In LEED (Low Energy Electron Diffraction) the wave nature of electrons utilized. Similarly to x-ray diffraction, electrons may interfere constructively or destructively with each other leading to diffraction patterns. We can therefore use electrons to obtain crystal structures. Here are a few web sites with more complete information:

Queen Mary and Westfield 
LEED movie OCI Vacuum Microengineering (LEED patterns from Si(111) at different electron beam energies.