X-ray Photoelectron Spectroscopy (XPS, also known as ESCA) uses highly focused monochromatised x-rays to probe the material of interest. The energy of the photo-emitted electrons ejected by the x rays are specific to the chemical state of the elements and compounds present, i.e. bound-state or multivalent states of individual elements can be differentiated.

The "small-spot" capabilities allow one to obtain XPS information at 30-micron resolutions, making XPS chemical mapping and imaging a viable surface research tool. The XPS can easily analyze nonconductive samples with the system's charge neutralization. Fast entry lock allows 15 minutes of turn-around time. The system has a cold stage, which allows sample analysis at liquid nitrogen temperatures.

Small-spot XPS can provide the following information about samples:

Elemental identification and quantification

Chemical functional group identification and quantification

Chemical state imaging

Surface sensitivity

Layer-by-layer depth profiling

Minimal sample damage

Analysis of insulating and conducting samples

Data collection / stage automation

Cold stage