APPLICATION OF SECONDARY NEUTRAL MASS SPECTROMETRY IN LOW-ENERGY
SPUTTERING YIELD MEASUREMENTS
S. Bhattacharjee, J. Zhang, V. Shutthanandan, P.K. Ray
Mechanical Engineering Department, Tuskegee University, Tuskegee, AL 36088*
N. R. Shivaparan and R.J. Smith
Physics Department, Montana State University, Bozeman MT 59717**
An experimental study was initiated to measure low-energy (150 to 600
eV) sputtering yields of molybdenum with xenon ions using a secondary neutral
mass spectrometer (SNMS). An ion gun was used to generate the ion beam.
The ion current density at the target surface was approximately 30 uA/cm^2.
The SNMS spectra obtained at 50 degree incident angle were converted to
sputtering yields for perpendicular incidence by normalizing SNMS spectral
data at 500 eV with the yield measured by Rutherford backscattering spectrometry.
Sputtering yields as well as the shape of the yield-energy curve obtained
in this manner are in reasonable agreement with those measured by other
researchers using different techniques. Sputtering yields calculated by
using two semi-empirical formulations agree reasonably well with the measured
data.
*Work supported by NASA Grant NAG3-1388.
**Work supported by NASA EPSCoR Grant NCCW-0058.
Nuclear Instrument and Methods in Research B 129 (1997) 123
For information on this publication or to request a reprint send mail
to smith@physics.montana.edu
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Last Updated:6 August 1997